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Sunday 07 January 2018

Time .Cleanroom .PEP (Angela) .ROB 1 Balzers Evap 2 PR MA6 Aligner 3 PR Spinner Spinner Bench Hotplate 1 Spinner Bench Hotplate 2 4 PR Develop bench 5 PR Acid bench 6 TRION PECVD 7 PG/TMAH wetbench 8 Service Bay wetbench 9 Metal Liftoff bench Bruce 8 tube 6, Anneals RCA Diffusion bench Bruce 8 Tube 7, H2 Sinter LPCVD LOTOX LPCVD NITRIDE LPCVD POLY March Juniper II RIE MRC RIE OXIDATION Tube POCL Diffusion tube RTA - AG SEM SEM GOLD COATER Semicore Sputter dep Technics Etcher red room Technics etcher-in metal Tencor P1 Varian Sputter dep Zeiss Microscope 4086
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