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Sunday 27 August 2017

Time: .Cleanroom .PEP (Angela) .ROB 1 Balzers Evap 2 PR MA6 Aligner 3 PR Spinner Spinner Bench Hotplate 1 Spinner Bench Hotplate 2 4 PR Develop bench 5 PR Acid bench 6 TRION PECVD 7 PG/TMAH wetbench 8 Service Bay wetbench 9 Metal Liftoff bench Diffusion RCA bench H2 Anneal(Bruce 8 Tube 7 LPCVD LOTOX LPCVD NITRIDE LPCVD POLY March Juniper II RIE MRC RIE OXIDATION Tube POCL Diffusion tube RTA - AG SEM SEM GOLD COATER Semicore Sputter dep Technics Etcher red room Technics etcher-in metal Tencor P1 Varian Sputter dep Zeiss Microscope 4086
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