Tom Smy, Ph.D. (Alberta)
Professor
Email: tjs@doe.carleton.ca
Voice: +1 613 520-3967
FAX: +1 613 520-5708
Office: 4156ME
DOE Video
talk
Here is a paper on Photonics
in Canada that I have written (a french translated
version is here).
The paper was commissioned in March of 2001 by Industry Canada
Research Highlights
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I am currently in the final ;-) stages of a distribution version
of the Atar/3dfilms simulation suite. If you are interested in being
notified when this is available and under what conditions please email
me at tjs@doe.carleton.ca.
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3D Thin film modeling
Modeling of
engineered microstructures using 3D-Films
Modeling
of metal deposition over VLSI structures using SIMBAD
Atar simulations of heat flow in integrated microelectonic and
photonic devices
Research Interests
VLSI process and device simulation. Metallization issues; thin film
physics, experimental sputtering and evaporation; computer modelling of
thin film deposition techniques, including high temperature sputtering,
bias sputtering, and CVD; electromigration modelling and experimental
characterization. Computer modeling of thermal/electrical effects in
integrated devices.
A primary project of mine has been the development of SIMBAD/SIMSPUD.
A new development is the creation of a 3D thin film simulator 3DFILMS
Under development with D. Walkey is a thermal device simulator ATAR
Publications
Course Information
Course Notes for ELEC 4705 are here.
Course Notes for ELEC 4700 are here.
Course Notes for ELEC 1908 are here.
My 398 page for 2003 is here.
Other Interests
Squash! and more Squash! Not the plant but the game! and yoga and more
yoga.
Can't get too much yoga or squash.
Special links
poster
talk