An Applied Materials Technology AME 550 ellipsometer is available for measuring dielectric film thickness. Software has been written locally to allow application of the ellipsometer to multi-layer stacks. Accuracy is approximately +/- 1 nm for thin oxide layers. Thickness of opaque films is determined with a Dektak IIA profilometer.
Access to a JEOL JSM-6400 SEM housed in the Department of Earth Sciences is available for sample inspection.
A complete 1 MHz CV test station consisting of a hot chuck with a Signatone temperature controller and computer-controlled HP4280 CV meter is available to test gate dielectric quality.