Courses

Integrated Circuit Technology

ELEC 5509

Description:

Survey of technology used in silicon VLSI integrated circuit fabrication. Crystal growth and crystal defects, oxidation, diffusion, ion implantation and annealing, gettering, CVD, etching, materials for metallization and contacting, and photolithography. Structures and fabrication techniques required for submicron MOSFETs. Applications in advanced CMOS processes.

Department of Electronics
Mackenzie Building 5170
1125 Colonel By Drive,
Ottawa, ON K1S 5B6

Tel: 613-520-5755 Fax: 613-520-5708

Email: info@doe.carleton.ca

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