Research Projects
Recent research projects completed or underway in the MFF
with a link to the faculty member primarily responsible are
listed below.
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Fabrication of silicon-on-insulator CMOS with backgate
electrodes for threshold voltage control in low-power
circuits. N.G. Tarr
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Fabrication of heterostructure pMOSFETs using pure
pseudomorphic Ge channels.
(Ge deposition carried out at NRC). N.G. Tarr
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Development of a process for platinum salicidation of
MOSFET source/ drain regions. T.J. Smy
-
Fabrication of pseudomorphic SiGe alloy base HBTs to
study bandgap narrowing in heavily-doped SiGe alloy
bases. (SiGe deposition carried out at NRC). N.G. Tarr
-
Fabrication of a silicon "optical bench" using Fresnel
lenses fabricated by micromachining techniques. B.A Syrett
-
Study of fundamental thin film growth phenomena, in
particular the deposition of refractory metals using
directed deposition techniques. T.J. Smy
-
Study of boron diffusion through 10 nm gate oxides from
in-situ doped p+ poly gates. N.G. Tarr
-
Investigation of high temperature Al reflow and
deposition techniques for via/contact filling.
T.J. Smy
-
Experimental analysis and modeling of dry etching
processes for fabrication of small topographies for VLSI
and micromachining. T.J. Smy
-
Experimental support of Monte Carlo 2D and 3D modeling of
thin film deposition/etching processes for VLSI backend
processing using the SIMBAD simulator. T.J. Smy
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