VMIC-2000 - Invited paper (a summary of VLSI deposition stuff to date)
AMC-2000 - 3D growth over VLSI topography
TOPO1 - Basic modeling results for 3D film growth over VLSI topography
CVD - Modeling non-unity sticking film growth processes for VLSI metal deposition.
AMC-2000 - Modeling electrical via and film resistances
JVSTA-2507 - Basic GLAD film modeling
MRS 2000 Spring - Presentation on using 3D-Films for modeling GLAD (porous film growth)
Thermal - Using 3D-Films to model heat flow through GLAD films
Microchannel - GLAD films and simulations over topography
Periodic - Simulations and experimental results for GLAD films on a patterned substrate
MRS 2000 Fall - Basic GLAD growth with 3D-Films modeling of AFM and SEM images
Here are some other simulation results